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CHARACTERIZATION OF A WIRELESS VACUUM SENSOR PROTOTYPE BASED ON THE SAW PIRANI PRINCIPLE
1 : Institue of Microstructure Technology
Hermann von Helmholtz Platz 1 76344 Eggenstein Leopoldshafen -
Germany
| Subject : | : | oral |
| Topics | : | Gas Sensors and Sensor integration |
| PDF version | : |  PDF version |
